%0 Journal Article
%T Three x-ray mask-making methods applied for LIGA process
%A Yang, Hsiharng
%A Kang, Shung-Wen
%A Chou, Min-Chieh
%J Proceedings of SPIE
%V 3748
%N 1
%P 495-502
%@ 0277-786X
%D 1999-08-25
%I SPIE
%~ DeepDyve