%0 Journal Article
%T Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence
%A Dillon, A.C.
%A Ott, A.W.
%A Way, J.D.
%A George, S.M.
%A ,
%J Surface Science
%V 322
%N 1-3
%P 230-242
%@ 0039-6028
%D 1995-01-01
%I Elsevier BV
%~ DeepDyve