%0 Journal Article %T Measurement of nonlinear mechanical properties of PDMS elastomer %A Kim, Tae Kyung %A Kim, Jeong Koo %A Jeong, Ok Chan %A , %J Microelectronic Engineering %V 88 %N 8 %P 1982-1985 %@ 0167-9317 %D 2011-08-01 %I Elsevier BV %~ DeepDyve