%0 Journal Article
%T Analysis of x-ray diffraction as a probe of interdiffusion in Si/SiGe heterostructures
%A Aubertine, D. B.
%A Ozguven, N.
%A McIntyre, P. C.
%A Brennan, S.
%A ,
%J Journal of Applied Physics
%V 94
%N 3
%P 1557-1564
%@ 0021-8979
%D 2003-08-01
%I AIP Publishing
%~ DeepDyve