%0 Journal Article
%T Preparation of a Functionally Graded Fluoropolymer Thin Film and Its Application to Antireflective Coating
%A Senda, Kazuo
%A Matsuda, Tsuyoshi
%A Kawanishi, Takumi
%A Tanaka, Kuniaki
%A Usui, Hiroaki
%J Japanese Journal of Applied Physics
%V 52
%N 5S1
%@ 0021-4922
%D 2013-05-01
%~ DeepDyve