%0 Journal Article
%T Influence of deposition parameters on optical properties of titanium nitride thin films
%A Braic, Viorel
%A Pavelescu, Gabriela
%A Melinte, Dorin
%J Proceedings of SPIE
%V 2461
%N 1
%P 597-599
%@ 0277-786X
%D 1995-03-08
%I SPIE
%~ DeepDyve