%0 Journal Article
%T Patterning of titanium oxide nanostructures by electron-beam lithography combined with plasma etching
%A Hotovy, I
%A Kostic, I
%A Nemec, P
%A Predanocy, M
%A Rehacek, V
%J Journal of Micromechanics and Microengineering
%V 25
%N 7
%P 7
%@ 0960-1317
%D 2015-07-01
%~ DeepDyve