%0 Journal Article %T Design and Fabrication of Integrated Magnetic MEMS Energy Harvester for Low Frequency Applications %A Han, Mengdi %A Yuan, Quan %A Sun, Xuming %A Zhang, Haixia %A , %J Journal of Microelectromechanical Systems %V 23 %N 1 %P 204-212 %@ 1057-7157 %D 2014-02-01 %I Institute of Electrical and Electronics Engineers (IEEE) %~ DeepDyve