%0 Journal Article
%T Gaseous phase monitoring during reactive sputtering of yttrium in glow discharges
%A Khvostikov, V.
%A Grazhulene, S.
%J Journal of Applied Spectroscopy
%V 76
%N 6
%P 819-825
%@ 0021-9037
%D 2010-01-07
%I Springer US
%~ DeepDyve