%0 Journal Article
%T Use of optical absorption spectroscopy for the characterization of an Ar−Ti magnetron discharge
%A Britun, Nikolay
%A Gaillard, Mireille
%A Kim, Yong Mo
%A Kim, Kab Seog
%A Han, Jeon-Geon
%J "Metals and Materials International"
%V 13
%N 6
%P 483-488
%@ 1598-9623
%D 2007-12-01
%I The Korean Institute of Metals and Materials
%~ DeepDyve