TY - JOUR AU1 - Guo, Daoyou AU2 - Qin, Xinyuan AU3 - Lv, Ming AU4 - Shi, Haoze AU5 - Su, Yuanli AU6 - Yao, Guosheng AU7 - Wang, Shunli AU8 - Li, Chaorong AU9 - Li, Peigang AU1 - Tang, Weihua AB - Abstract Highly (201) oriented Zn-doped β-Ga2O3 thin films with different dopant concentrations were grown on (0001) sapphire substrates by radio frequency magnetron sputtering. With the increase of Zn dopant concentration, the crystal lattice expands, the energy band gap shrinks, and the oxygen vacancy concentration decreases. Both the metal semiconductor metal (MSM) structure photodetectors based on the pure and Zn-doped β-Ga2O3 thin films exhibit solar blind UV photoelectric property. Compared to the pure β-Ga2O3 photodetector, the Zn-doped one exhibits a lower dark current, a higher photo/dark current ratio, a faster photoresponse speed, which can be attributed to the decreases of oxygen vacancy concentration. TI - Decrease of oxygen vacancy by Zn-doped for improving solar-blind photoelectric performance in β -Ga 2 O 3 thin films JF - "Electronic Materials Letters" DO - 10.1007/s13391-017-7072-y DA - 2017-11-01 UR - https://www.deepdyve.com/lp/springer-journals/decrease-of-oxygen-vacancy-by-zn-doped-for-improving-solar-blind-8ptUh0sQZg SP - 483 EP - 488 VL - 13 IS - 6 DP - DeepDyve ER -