TY - JOUR
AU1 - Klug, Werner
AB - To protect the soft surface of organic CR 39 ophthalmic lenses we built up a parallel plate reactor and developed a Plasma Enhanced Chemical Vapor Deposition (PECVD) process for Si02 protection films. Beside high transmission in the VIS-range we obtained refractive indices between n=1.46 and n=l.49 depending on the process parameters at layer- thicknesses of 2,5 jnn to 5 jmt. Deposition rates up to 30 A/s and thickness uniformities of 10 % were achieved. The mechanical properties of these layers were tested with different methodes and gave better results compared with other technologies like ion-assisted deposition or lacquering.
TI - Plasma-enhanced CVD hard coatings for opthalmic optics
JF - Proceedings of SPIE
DO - 10.1117/12.22376
DA - 1990-12-01
UR - https://www.deepdyve.com/lp/spie/plasma-enhanced-cvd-hard-coatings-for-opthalmic-optics-BKuJDSySMQ
SP - 88
EP - 97
VL - 1323
IS - 1
DP - DeepDyve
ER -