TY - JOUR
AU - 
TI - Zero-Bending Piezoelectric Micromachined Ultrasonic Transducer (pMUT) With Enhanced Transmitting Performance
JF - Journal of Microelectromechanical Systems
DO - 10.1109/jmems.2015.2472958
DA - 2015-12-01
UR - https://www.deepdyve.com/lp/unpaywall/zero-bending-piezoelectric-micromachined-ultrasonic-transducer-pmut-J9GurhN2VD
DP - DeepDyve
ER -