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Two Selective Etching Solutions for GaAs on InGaAs and GaAs / AlGaAs on InGaAs

Two Selective Etching Solutions for GaAs on InGaAs and GaAs / AlGaAs on InGaAs Two solutions for selectively etching on and on are presented. A solution of is shown to have a etch rate more than 50 times higher than the etch rate of . A solution of etches both and selectively relative to , with a selectivity of 8 or more for. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Journal of the Electrochemical Society IOP Publishing

Two Selective Etching Solutions for GaAs on InGaAs and GaAs / AlGaAs on InGaAs

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Copyright
Copyright © 1990 ECS - The Electrochemical Society
ISSN
0013-4651
eISSN
1945-7111
DOI
10.1149/1.2087098
Publisher site
See Article on Publisher Site

Abstract

Two solutions for selectively etching on and on are presented. A solution of is shown to have a etch rate more than 50 times higher than the etch rate of . A solution of etches both and selectively relative to , with a selectivity of 8 or more for.

Journal

Journal of the Electrochemical Society – IOP Publishing

Published: Sep 1, 1990

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