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- Copyright
- Copyright © IOP Publishing Ltd
- ISSN
- 0960-1317
- eISSN
- 1361-6439
- DOI
- 10.1088/0960-1317/7/4/002
- Publisher site
- See Article on Publisher Site
Abstract
Well defined three-dimensional structures on titanium were fabricated by electrochemical micromachining. An optimum electrolyte composition and electrochemical parameters were determined for obtaining controlled cavity shapes and a smooth surface finish. Using a methanol based electrolyte, mass transport controlled dissolution conditions were identified and subsequently applied to the fabrication of arrays of hemispherical cavities in diameter. The results of the present study demonstrate the feasibility of using through-mask electrochemical etching for producing high-precision topographies on titanium.
Journal
Journal of Micromechanics and Microengineering – IOP Publishing
Published: Dec 1, 1997